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Tom's Hardware on MSNChinese scientists create solid-state DUV laser sources for chipmaking toolsThe Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...
tightened budgets and implementation of immersion optics and polarized illumination. Now the field is at an intersection. Whether DUV lithography remains the main technology for the next one or ...
ASML and Imec have signed a new strategic partnership agreement that will see the two companies focus on semiconductor ...
DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies. These tools will be installed in imec's state-of-the-art pilot line and incorporated in the EU- and Flemish ...
The collaboration will leverage ASML’s full product portfolio, including high-NA EUV, DUV immersion, and advanced metrology tools, within imec’s pilot line for sub-2nm R&D. Supported by EU and ...
ASML will contribute its full product portfolio, including advanced tools such as 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies.
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