The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...

tightened budgets and implementation of immersion optics and polarized illumination. Now the field is at an intersection. Whether DUV lithography remains the main technology for the next one or ...

ASML and Imec have signed a new strategic partnership agreement that will see the two companies focus on semiconductor ...

ASML and imec sign strategic partnership agreement to support semiconductor research and sustainable innovation in Europe Veldhoven (the ...

DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies. These tools will be installed in imec's state-of-the-art pilot line and incorporated in the EU- and Flemish ...

The collaboration will leverage ASML’s full product portfolio, including high-NA EUV, DUV immersion, and advanced metrology tools, within imec’s pilot line for sub-2nm R&D. Supported by EU and ...

The company claims its proprietary deep ultraviolet (DUV) and non-optical process equipment... Save my User ID and Password Some subscribers prefer to save their log-in information so they do not ...

ASML will contribute its full product portfolio, including advanced tools such as 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies.

The collaboration incorporates ASML’s whole product portfolio, with a focus on developing high-end nodes, using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical ...